MicroSense, LLC

MicroSense, LLC, previously known as ADE Technologies, is comprised of two primary businesses – precision capacitive position sensors, and vibrating sample magnetometers for state-of-the-art magnetic measurement. Until the company was sold in November, 2009, we were a subsidiary of KLA-Tencor Corporation, a leading global supplier of semiconductor wafer defect inspection and metrology tools.  MicroSense serves a host of industries including data storage, machine tool, and automotive. MicroSense provides customer value and security, through extensive business experience, financial strength, world-wide support, and technical leadership.

Pioneering High Resolution Measurement with Capacitive Sensors

Founded in 1967 by Robert C. Abbe, our capacitive sensor business was originally a part of ADE Corporation. ADE Corporation was renowned for its visionary and novel approaches to high resolution, non-contact measurement for demanding dimensional gaging applications.  Over time, ADE grew to become the world's leading supplier of tools for bare semiconductor wafer measurement. High resolution capacitive sensors for position and displacement measurement (also known as “cap gages”) became synonymous with “ADE” and our trademarked name, “MicroSense”.

Based on patented capacitance sensing technology, we provide sensors used to make very precise, high bandwidth measurements of precision products such as hard disk drive motors, air bearing spindles, precision X-Y stages, optical disks, automotive parts and machine tools. Our capacitive displacement sensors provide the highest resolution in the industry, less than 0.05 nanometers, with virtually unlimited service life.

Award Winning Tools for Magnetic Measurement

The MicroSense magnetic metrology business was started as Digital Measurement Systems (DMS) over 25 years ago, and continued as a part of ADE Technologies since 1997.

With our team of world class experts in magnetic property measurement, MicroSense is the leading supplier of high sensitivity Vibrating Sample Magnetometers for magnetic measurement. Our vibrating sample magnetometers are available in several models with a variety of capabilities, field ranges, resolutions and options. Our VSM systems are used for fundamental magnetic research at the most prestigious magnetics laboratories worldwide in both academic and commercial realms. A range of in-line, production magnetic metrology tools are also offered to meet the stringent demands of manufacturing today's rapidly advancing hard disk storage systems.