Capacitive Sensors for Vibration Measurement
Non-contact precision capacitive sensors feature small, low mass sensors heads and fast response time, so they are well suited for measuring vibration in a variety of high performance machines including precision X-Y stages, machine tools, high speed printing equipment and semiconductor fabrication equipment.
- Ideal for vibration measurement applications where it is not possible or practical to use an accelerometer.
- For precision stages used in semiconductor manufacturing, it is possible to measure vibration of the stage stack at the wafer plane, without adding mass to the wafer chuck.
- Use for non-contact measurement of structural vibration in precision scanning stages to determine effect vertical vibration relative to system optics. This provides the design engineer with a powerful diagnostic tool when evaluating the structural rigidity of scanning systems.
- Capacitive sensors provide servo system feedback for high performance, active vibration isolation systems.
||Vibration measurement, up to 20 KHz measurement bandwidth|
||Vibration measurement, up to 100 KHz measurement bandwidth|