Capacitive Sensors for Vibration Measurement

Non-contact precision capacitive sensors feature small, low mass sensors heads and fast response time, so they are well suited for measuring vibration in a variety of high performance machines including precision X-Y stages, machine tools, high speed printing equipment and semiconductor fabrication equipment.

• Ideal for vibration measurement applications where it is not possible or practical to use an accelerometer.
• For precision stages used in semiconductor manufacturing, it is possible to measure vibration of the stage stack at the wafer plane, without adding mass to the wafer chuck.
• Use for non-contact measurement of structural vibration in precision scanning stages to determine effect vertical vibration relative to system optics. This provides the design engineer with a powerful diagnostic tool when evaluating the structural rigidity of scanning systems.
• Capacitive sensors provide servo system feedback for high performance, active vibration isolation systems.