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Capacitive Sensors for Distance and Displacement Measurement

Among displacement measurement systems, only capacitive sensors offer the resolution of distance measuring interferometers. Since capacitive sensors are completely non-contact, they will not perturb the target being measured through contact or by adding mass. Typical uses of our sensors as a displacement measurement system include:

  • Measuring axial displacement of shafts, precision ball screws and diaphragms.
  • Repeatability measurement of precision mechanisms and stages.
  • Non-contact dimensional measurement of machined parts.
  • Precision bearing measurement

Straightness & Flatness Measurement of Precision Stages

MicroSense capacitive sensors provides a method for making direct measurements of straightness and flatness of high precision machine tools and stages, without the averaging errors found in laser interferometer based systems.


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Demodulator Sensor Series Application
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