Precision Capacitive Position Sensors

Non-contact Position Measurement with High Resolution over Short Ranges

Based on our patented capacitive sensing technology, MicroSense offers the widest range of non-contact capacitive position sensors in the industry, in order to meet your exact application requirements.  Sensor performance is optimized for high stability and linearity, or, highest resolution and measurement bandwidth. 

All MicroSense® position sensors feature:

  • Completely non-contact capacitive position measurement - the most accurate electrical sensing technology available
  • Detection of any conductive, grounded target – surface finish or material have no effect on accuracy
  • Optimized for short measurement ranges –10 micrometers up to 4 millimeters, depending upon sensor size
  • High accuracy, fast response

Position Sensor and Measurement System Selection Guide

 

Precision Capacitive Position Sensors Microsense 4800 SeriesMicroSense 4800 Series

Designed for best linearity and stability, the 4800 series is our most versatile all around position sensor. Read More

 

MicroSense 8800 Series

Designed for best linearity and stability, with measurement bandwidth up to 20 kHz – ideal for servo system position feedback and fast tool servo applications. Ultra low noise design, sub-nanometer resolution. Read More

 

MicroSense 5800 Series

Designed for high dynamic applications – high resolution with measurement bandwidth up to 100 kHz. Reliably measure even poorly grounded targets such as air bearing spindles and motors. Read More

MicroSense 6800 Series

Our lowest noise sensor achieves picometer resolution. State-of-the-art design provides high resolution with increased standoff from the sensor to the target. Read More

MicroSense Mini

A compact, cost effect nanopositioning sensor for Original Equipment Manufacturers – ideal for use in piezo driven flexure stages and other short travel nanopositioners. Read More

Sensors for Measurement in Vacuum Environments

We specialize in low out-gassing sensors for ultra clean, high vacuum and UHV applications Read More

MicroSense 6360 Thickness Measurement Gauge

Non-contact, bench top precision thickness measurement gage for CD stampers, DVD stampers and disk media. Read More

MicroSense SpinCheck Spindle Metrology System

Ideal for measurement of repeatable run out and non-repeatable run out of hard disk drive spindle motors and other precision, rotating mechanisms. Read More

MicroSense NanoDAQ Measurement Software

Easy to use software for displacement measurement and data logging. Read More

Applications

Recommendations on using our sensors for a variety of applications. Read More