Valuable Information about Magnetic Metrology Systems

Polar Kerr - (112kb)

Polar Kerr effect-based non-destructive, non-contact measurement of the magnetic properties of PMR media.The Polar Kerr system rapidly and automatically generates a map of the magnetic
properties of the disk on both sides. The number and location of measurement points and the maximum applied field are user-settable and can be saved in recipe files.

The system can simultaneously measure both sides of the disk within less than 20 seconds. The Polar Kerr system is capable of characterizing the most advanced media, utilizing a user-defined sweep rate and a maximum applied field of ±2.65 Tesla, exceeding any current production requirements and allowing for future generations of PMR media.

KerrMapper (180kb)

The KerrMapper S300 and V300 perform non-contact mapping of the magnetic properties of MRAM, MR, GMR, TMR and other wafers up to 300mm.

The S300 and V300 Wafer Mapping Systems rapidly and automatically create a map of the magnetic properties of entire wafers or coupons made in conjunction with head wafers used to fabricate advanced heads or MRAM wafers. This permits rapid process feedback early to avoid adding expense to wafers, or portions of wafers, that may have poor yields. It also provides rapid feedback to the fabrication process, allowing users to make adjustments to the process to improve overall yield.

DiskMapper M3 (158kb)

The DiskMapper M3 measures the uniformity of critical magnetic properties, such as the remanence thickness product (Mrt), the remanence coercivity (Hr), and the remanent nucleation field (Hnr), providing feedback for deposition process control.

The DiskMapper M3 provides non-contact, non-destructive magnetic measurements of the entire disk. The number and location of tracks as well as the maximum applied field are user settable and can be saved in recipes. The cassette-loaded system can simultaneously read both sides of the disk and measure the recording layer remanence thickness product (Mrt) variation along a track. In addition, the DiskMapper M3 can also map the remanence coercivity, Hr, and the remanent nucleation field, Hnr. The track, side and disk average as well as the average peak-to-peak and standard deviation of the measured parameters are calculated and saved to disk. Utilizing a patent-pending perpendicular writing head capable of generating a 1.5 Tesla magnetic field at the disk surface, the tool is easily able to write media with Hr values in excess of 6000 Oersteds. Thus, the DiskMapper M3 is capable of characterizing the most advanced media, exceeding any current production requirements.